Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The effect of careful control over metal and oxygen stoichiometry on the structures of various Mn+1M′n+1 O3n+5 phases (M = La and/or Sr, M′ = Ti and/or Nb) has been studied by transmission electron microscopy. In addition to the previously reported n = 3 and 4 layered phases and the n = ∝ parent perovskite, ordered and disordered intergrowth structures comprising the n = 2, 3, 4, and ∝ members have been characterized. The effects of in situ reduction in the electron microscope were studied. © 1993 Academic Press, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ming L. Yu
Physical Review B
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B