E. Spiller, D.E. Eastman, et al.
Journal of Applied Physics
Paper
Lithography and microscopy with X-rays
Abstract
In this review of recent progress in lithography and microscopy by X-rays the authors show how X-ray lithography is used to replicate microcircuit patterns with dimensions below 1 mu m, and how these advances have improved the older technique of X-ray microradiography.
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