Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
The use of In2Se3 as a semiconductor for the low-voltage transistor employing a high-mobility spin-coated chalcogenide semiconductor was discussed. The hydrazinium precursor was isolated in bulk form to avoid hydrazine use during film deposition. Thin-film transistors (TFT) based on the spin-coated chalcogenide films was fabricated employing a relatively thin (250 Å) thermal SiO3 gate insulator and co-evporated gold/indium contacts. It was found that at low drain voltage, the TFT demonstrates typical transistor-like behavior, as drain current increases linearly with drain voltage.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
R. Ghez, J.S. Lew
Journal of Crystal Growth
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry