Machining Integrated Optical Structures in Photoresist

G. Burks, F.H. Dill, et al.

Proceedings of the IEEE

H.N. Yu, F.H. Dill

IEEE T-ED

M. Exterkamp, W. Wong, et al.

Proceedings of SPIE 1989

Michael G. Rosenfield, Douglas S. Goodman, et al.

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena