Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
We describe a refined technique for magnetic force microscopy (MFM) which makes possible magnetic imaging with 25 nm resolution. Previous MFM work has relied on a servo system which used the amplitude of the response of an electropolished iron wire cantilever tip to an applied, near-resonance excitation to maintain a constant force gradient between tip and sample. The present results have been obtained with a redesigned instrument which uses a fast lock-in detector to servo on the phase, as opposed to the amplitude of the tip response. With these changes and the use of sharp electrochemically etched Ni tips, it is possible to servo stably on the very weak force gradients encountered in MFM, within 20 nm of the sample surface, and thus obtain 25 nm resolution.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
R.J. Von Gutfeld, D.R. Vigliotti, et al.
Applied Physics Letters
C.C. Williams, H.K. Wickramasinghe
Nature
C.C. Williams, H.K. Wickramasinghe
Journal of Applied Physics