Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Curvatures produced by magnetization of the film in a system of a magnetic film bonded to a much thicker substrate are calculated for a model of a cantilevered system clamped flat at the clamped end. The curvatures are found by minimizing the total energy of the system, which includes magnetoelastic and elastic energy, with respect to a constant curvature in the length, but a variable curvature in the width that vanishes at the clamped end. Application to a measured system is made and the value of a magnetoelastic coefficient for a clamped system is compared with the value for a free system, when both are calculated from the measured deflections. Criticisms are made of previous erroneous derivations of the curvature of the free system, including one by the author.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Eloisa Bentivegna
Big Data 2022