Measurement of VLSI Power Supply Current by Electron-Beam Probing

Keith A. Jenkins; Robert L. Franch

doi:10.1109/4.135341

IEEE Journal of Solid-State Circuits

Paper

01 Jan 1992

Measurement of VLSI Power Supply Current by Electron-Beam Probing

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Abstract

The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. © 1992 IEEE

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