Robert E. Donovan
INTERSPEECH - Eurospeech 2001
Periodic structures, that is, structures that consist of a basic pattern which is repeated multiple times, are commonplace in the electronics industry. This paper is concerned with the determination of thermal stresses in such structures. Specifically, it is demonstrated that thermal stresses can be computed using a reduced model, if one uses the correct boundary conditions. It is also shown that a reduced model can give very misleading results if incorrect boundary conditions are employed. © 1992 by ASME.
Robert E. Donovan
INTERSPEECH - Eurospeech 2001
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005
Thomas R. Puzak, A. Hartstein, et al.
CF 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007