Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Based on a multidimensional system of parallel coordinates, a one-to-one mapping between subsets of RN and subsets of R2 is constructed, providing a systematic way of visualizing analytic and synthetic N-dimensional geometry. This method is new.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON