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Photomask and Next-Generation Lithography Mask Technology 2004
A spherical harmonics expansion method of the Boltzmann Transport Equation (BTE) in the three-dimensional space is proposed. The method is quite general in terms of scattering matrix and band structure. We show a numerical application to a two-dimensional p-n junction. © 1992.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Imran Nasim, Melanie Weber
SCML 2024
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SPIE Advanced Lithography 2000