Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Eric Price, David P. Woodruff
FOCS 2011
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002