E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The sputter gun system has a unique feature which is that the substrate holder is electrically isolated from and physically outside the cathode and anode gun assembly. As a result the substrate surface temperature can be maintained at a lower level than that for the conventional diode sputtering system. This feature is particularly useful for metallization by the lift-off process. NiFe films with excellent physical and magnetic properties have been obtained. The application to overlay patterns for single-level masking bubble devices is presented. © 1976.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
P. Alnot, D.J. Auerbach, et al.
Surface Science
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J. Tersoff
Applied Surface Science