A.N. Broers, M. Pomerantz
Thin Solid Films
Paper
Observation of Fresnel fringes in the conventional scanning electron microscope
Abstract
Images of Fresnel fringes have been obtained in the conventional surface scanning electron microscope operating in the transmission mode. These fringes provide a means for critically evaluating instrument resolution, final lens astigmatism, and source brightness. © 1972 The American Institute of Physics.