Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Andrew Skumanich
SPIE Optics Quebec 1993
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004