Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The study of density-dependent stochastic population processes (DDSPPs) is important from a historical perspective as well as from the perspective of a number of existing and emerging applications today. In more recent applications of these processes, it can be especially important to include time-varying parameters for the rates that impact the density-dependent population structures and behaviors. Under a mean-field scaling, we show that such time-inhomogeneous DDSPPs converge to a corresponding nonautonomous dynamical system. We then analogously establish that the optimal control of such time-inhomogeneous DDSPPs converges to the optimal control of the limiting dynamical system. An analysis of both the dynamical system and its optimal control renders various important mathematical properties of interest.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Charles Micchelli
Journal of Approximation Theory
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996