Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989