A.C. Tam, W. Zapka, et al.
SPIE Microelectronic Processing Integration 1991
Paper
OPTICAL DETECTION OF PHOTOACOUSTIC PULSES IN THIN SILICON WAFERS.
Abstract
The propagation of photoacoustic pulses in thin silicon wafers is studied by a probe-beam deflection method. A comparison with transducer measurements is made, which suggests the existence of a nonpropagating plate mode. A signal-to-noise analysis is carried out, and the sensitivity of this detection scheme is analyzed for the case of high-frequency broad-band detection.
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