S.I. Raider, S.R. Herd, et al.
Applied Physics Letters
The techniques of optical emission spectroscopy with actinome-try, laser induced fluorescence spectroscopy, laser optogalvanic spectroscopy and absorption spectroscopy are discussed. Examples of the application of these techniques to probing low pressure plasmas of the type used in microelectronics materials processing are presented. © 1985 IUPAC
S.I. Raider, S.R. Herd, et al.
Applied Physics Letters
R.F. Dreyfus, Roger Kelly, et al.
Proceedings of SPIE 1989
K.L. Saenger, R.E. Walkup, et al.
ECS Meeting 1983
S.K. Loh, J.M. Jasinski
The Journal of Chemical Physics