Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
A universal method for representing solutions of the initial value problem ut = −2πiDu is presented for a large class of pseudo‐differential operators. The representations take the form of a path integral‐like operator. Three numerical approaches for evaluating these operators are treated. Practical interest in such universal methods depends on massively parallel computing systems. Copyright © 1990 Wiley Periodicals, Inc.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
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SPIE Advanced Lithography 2008
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SPIE Advanced Lithography 2007