T.J. Chuang, H. Hiraoka, et al.
Applied Physics A Solids and Surfaces
No abstract available.
T.J. Chuang, H. Hiraoka, et al.
Applied Physics A Solids and Surfaces
H. Hiraoka, A.M. Patlach, et al.
Proceedings of SPIE 1989
H. Hiraoka, J. Pacansky
JES
H. Hiraoka, J. Duran
Microlithography 1986