PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related PolymersH. HiraokaJES
PaperPolymer degradation in reactive ion etching and its possible application to all dry processesH. Hiraoka, L.W. Welsh Jr.Radiation Physics and Chemistry
Conference paperEnhancement of RIE resistance of conventional resist materialsH. HiraokaProceedings of SPIE 1989
Conference paperHigh resolution polymer pattern fabrications with Low energy proton beamsH. HiraokaMicrolithography 1984