J.A. Barker, D. Henderson, et al.
Molecular Physics
Paper
Physical and chemical mechanisms in the ion-enhanced etching of silicon
Abstract
No abstract available.
Related
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
Sung Ho Kim, Oun-Ho Park, et al.
Small
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry