B.S. Meyerson, M.L. Yu
ECS Meeting 1983
Normalized ionization probabilities α+ are reported for binary Fe-Ni alloys under O+2 bombardment at a 45° incidence angle. It is shown that the dependence of α+ on the composition is much smaller than at normal incidence. Photoemission spectroscopy reveals that both nickel and iron remain essentially metallic under oblique-incidence bombardment, whereas almost complete oxidation occurs at normal incidence. This is attributed to our observation that sputter yields under oxygen bombardment increase much faster than cos α-1.
B.S. Meyerson, M.L. Yu
ECS Meeting 1983
B.N. Eldridge, C. Feger, et al.
Macromolecules
E. Kratschmer, H.S. Kim, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
H.S. Kim, M.L. Yu, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures