Conference paper
Channel cracking in low-k films on patterned multi-layers
X.-H. Liu, T.M. Shaw, et al.
IITC 2004
A device is presented that sweeps out programmable optical delays of 300 ps (or less) at 30 Hz, with shorter-delay scans possible at much higher rates. It is compact, vibration-free, linear to within 0.02%, and has a position repeatability of 1 part in 105. With this scanner and a PC-based signal-averaging data acquisition system, ultrafast autocorrelation measurements with very high signal/noise are demonstrated in both the fs and ps domains.
X.-H. Liu, T.M. Shaw, et al.
IITC 2004
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IEEE Topical Meeting EPEPS 1999
M. Scheuermann, C.C. Chi, et al.
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