Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Review
Recent developments in molecular beam epitaxy
Abstract
In this review, progress in MBE (molecular beam epitaxy) synthesis of a diverse range of materials is discussed. These include tilted GaAs-AlxGa1-xAs superlattices, oxide superconductors, fluorides, magnetic metal multilayers and buried metals in semico nductors. © 1990.
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