Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
T. Graham, A. Afzali, et al.
Microlithography 2000
Sankar Basu
Journal of the Franklin Institute
M. Tismenetsky
International Journal of Computer Mathematics