A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
No abstract available.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Naga Ayachitula, Melissa Buco, et al.
SCC 2007