J.Z. Sun, L.S. Yu-Jahnes, et al.
IEEE TAS
We report a simple, single-target magnetron sputtering process for films of high-temperature superconductors involving an off-axis sputtering geometry. The process lends itself both to film growth with high-temperature post-anneals and to low-temperature in situ film growth. The post-anneal process routinely yields YBa2Cu3O7-x films on SrTiO3 substrates that are fully superconducting at 86-89 K. Current densities at 77 K range from 104 to 8×105 A/cm2. A single-level superconducting quantum interference device (dc SQUID), made by photolithographically patterning a low current density film, has a flux noise level at 77 K of 3×10-4 Φ0/(Hz) 1/2 at 20 Hz, dominated by low-frequency noise associated with flux motion in the film.
J.Z. Sun, L.S. Yu-Jahnes, et al.
IEEE TAS
C. Vanneste, C.C. Chi, et al.
Journal of Applied Physics
W.J. Gallagher, T. Worthington, et al.
Physica B+C
B. Oh, R.H. Koch, et al.
Physical Review B