Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Resonance enhancement of the 3d photoemission intensity in angle-integrated electron-distribution curves from Ni{001} is observed when the photon energy is varied in the vicinity of the Ni 2p absorption threshold. Explanation of the effect involves a Fano-like interference between continuum excitation from the 3d band and discrete excitation from the 2p level to form a core exciton, coupled to each other via the decay of the exciton and the ejection of a 3d electron into the continuum. The binding energy of the core exciton is about 3.5 eV below the absorption threshold. Differences between the 2p 3d and the well-known 3p 3d resonance effect are discussed. © 1989 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Ronald Troutman
Synthetic Metals
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics