Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The intermediate-valence state of Sm in Sm1-xYxS has been investigated in terms of the d.c. and optical scattering time of the conduction electrons. Strong resonant scattering in the collapsed metallic phase is attributed to the pinning of the Fermi level EF within a mixed-configuration resonant state. The composition- and temperature dependent electronic phase transition is found to occur when EF reaches the resonant state. © 1976.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering