Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have performed ultrahigh vacuum (UHV) scanning tunneling microscopy studies of biological molecules by developing a UHV compatible cell wherein a drop of ultrapure water containing nanograms of molecules is evaporated from a strongly chemisorbing Pt(111) surface in an Ar ambient. Images are presented for hydroquinone; oligomers including pentaphenyl ether, enkephalin, and sodium dodecyl sulfate; large homopolymers of lysine and glycine; the proteins calmodulin, tropomyosin, and immunoglobin G; and double- and single-stranded plasmid DNA. In all cases the apparent height is only a few Å. Imaging properties understandably vary from clearly resolved internal molecular structure for hydroquinone to diffuse, artifact-prone images for molecules which exceed tens of angstroms in thickness. These data do not support claims for atomic resolution imaging of complex biomolecules. © 1993, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
E. Burstein
Ferroelectrics
John G. Long, Peter C. Searson, et al.
JES