PaperExtended x-ray absorption fine structure studies by soft x-ray fluorescence detectionF. Sette, S.J. Pearton, et al.Physica Scripta
PaperInductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixturesH. Cho, K.B. Jung, et al.Materials Science and Engineering B: Solid-State Materials for Advanced Technology
PaperExtended x-ray absorption fine structure studies by soft x-ray fluorescence detectionF. Sette, S.J. Pearton, et al.Physica Scripta
PaperParametric study of NiFe and NiFeCo high density plasma etching using CO/NH3K.B. Jung, J. Hong, et al.JES
