Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
No abstract available.
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
T. Schneider, E. Stoll
Physical Review B
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures