Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry

Marcus A. Worsley, Mark Roberts, et al.

Microelectronic Engineering

Joseph M. Jasinski, Joan K. Frisoli, et al.

Faraday Discussions of the Chemical Society

Joseph M. Jasinski, Joan K. Frisoli, et al.

Journal of Physical Chemistry

E. Todd Ryan, Stephen M. Gates, et al.

Journal of Applied Physics