Cheng-Yen Wen, Mark C. Reuter, et al.
ECS Transactions
Using site controlled growth of single vapor-liquid-solid silicon nanowires high aspect ratio atomic force microscope probes are fabricated on a wafer scale. Nanowire probe aspect ratios as high as 90:1 are demonstrated. Probe performance and limitations are explored by imaging high aspect ratio etched silicon structures using atomic force microscopy. Silicon nanowire probes are an ideal platform for non-destructive topographic imaging of high aspect ratio features. © 2012 American Institute of Physics.
Cheng-Yen Wen, Mark C. Reuter, et al.
ECS Transactions
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Nanotechnology
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APL Materials
Kimberly A. Dick, Suneel Kodambaka, et al.
Nano Letters