Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An experiment of solution processing of organic thin film transistors (TFT) to a p-type material, is presented. A soluble precursor was prepared by combining a copper(I) sulfide (Cu 2S) and sulfur (1:2 molar ratio) solution with an indium(III) selenide (In 2se 3) and selenium (1:1) solution. Thermally oxidized silicon wafers were cleaned using a piranha process (4:1 concentrated sulfuric acid to hydrogen peroxide) to prepare the films. The experimental result reveals that it is possible to fabricate preliminary ambipolar TFTs within the same Cu 1-xInSe 2-y material system by preparing films with selenium deficit.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Imran Nasim, Melanie Weber
SCML 2024