J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Rafae Bhatti, Elisa Bertino, et al.
Communications of the ACM
Matthias Kaiserswerth
IEEE/ACM Transactions on Networking
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004