Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We discuss the effects of shear rates on the structure, rheology and kinetics of phase separation in binary fluids through numerical Langevin simulations in both two- and three-dimensions. Our major findings are as follows: (1) shear flow distorts the isotropy properties in normal spinodal decomposition. Under stronger shear, a string phase appears; (2) domains grow differently in directions parallel and perpendicular to the flow direction; (3) excess shear viscosities due to shear flow have a characteristic peak as a function of shear rates. We compare our findings with the experimental data and simulation results which do not incorporate hydrodynamics.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sung Ho Kim, Oun-Ho Park, et al.
Small
Eloisa Bentivegna
Big Data 2022
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings