Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
An exact treatment of a cooperative Jahn-Teller transition is presented. The results are expressed in terms of the thermodynamic properties of the Ising model. The dynamic behavior of fluctuations is discussed in terms of irreversible thermodynamics. © 1973 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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