Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
It is shown by means of example that for each n > 3, there is a minimal n-state stochastic automaton whose output behavior is a word function of rank 3. Thus, there are stochastic word functions whose natural representation may be quite unwieldy, but whose values nevertheless can be computed in a rapid, compact fashion. © 1986.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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SPIE Optical Science, Engineering, and Instrumentation 1998
Chai Wah Wu
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A. Skumanich
SPIE OE/LASE 1992