O.G. Schmidt, U. Denker, et al.
Materials Science and Engineering: B
We report on strain and stability measurements on pseudomorphic Si 1-yCy/Si1-xGex superlattices which are synthesized by solid source molecular beam epitaxy on silicon (100) substrate. The strain in the superlattices alternates between tensile and compressive in the individual Si1-yCy and Si 1-xGex alloy layers, respectively. A symmetrical strain distribution can be achieved directly on silicon by adjusting the carbon and the germanium content and/or the thickness of the individual layers. X-ray diffraction and transmission electron microscopy are applied to investigate the structural properties and the thermal stability.
O.G. Schmidt, U. Denker, et al.
Materials Science and Engineering: B
M.S. Goorsky, Subramanian S. Iyer, et al.
Applied Physics Letters
Subramanian S. Iyer, S.L. Delage, et al.
Applied Physics Letters
P.E. Hallali, H. Baratte, et al.
Applied Physics Letters