Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new structure is proposed for the Si(111)-(7×7) surface which is consistent with recent tunneling microscopy and ion-scattering data. It consists of 12 trimers which are located near the points (1,1), (3,1), (1,3), (5,1), (1,5), (3,3), (4,4), (6,2), (2,6), (6,4), (4,6), (6,6) of a (7×7) unit cell. The bonding of the trimers is similar to the -bonded chain model for Si(111)-(2×1) but only half as many bond flips are required to reconstruct the surface. Broken bonds are eliminated by removing atoms along the boundaries between eclipsed and staggered structures. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Melanie Weber
SCML 2024
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science