Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A series of semiflexible fluorocarbon oligomers containing an aromatic core, F(CF2)nC8H4− (CF2)nF, have been synthesized and characterized by thermal analysis and both Fourier transform and conventional Raman spectroscopy. Measurements at ambient and low temperature and as a function of pressure were utilized to investigate the impact of the rigid ring on the low-frequency longitudinal acoustic mode (LAM) of the fluorocarbon chain. Normal-coordinate calculations as a function of chain length were performed to provide insight into molecular motion in the low-frequency region. © 1991, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Ming L. Yu
Physical Review B
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials