Conference paper
RAPID ANNEALING OF SILICON.
R.T. Hodgson, V.R. Deline, et al.
MRS Proceedings 1983
R.T. Hodgson, V.R. Deline, et al.
MRS Proceedings 1983
S. Mader, S.R. Herd
Journal of Applied Physics
S. Mader, S.R. Herd
Thin Solid Films
R.T. Hodgson, V.R. Deline, et al.
Applied Physics Letters