J.C. Marinace
JES
The surface of p-Si has been treated in a number of ways, and the rate of the photoelectrochemical reduction of water to hydrogen measured on each type of surface. Correspondingly, in-situ ellipsometric determinations of thickness and refractive index of the surface films were made; corresponding XPS, ISS and SIMS studies were also carried out. The photoelectrochemical activities of the surfaces, as measured by the positive shift on the potential axis of the mid-current point of the photocurrent/potential curve, differed greatly. In treatments with HF, the chemical structure of the surface remains that of SiO2; in treatments with aquaregia and HF, the surface becomes SiO. After hydrogen evolution, SiOH bonds appear. The degree of dependence of the photoelectrochemical activity on the surface characteristics indicates that a reaction at the semiconductor/solution interface controls the overall (consecutive) photoelectrochemical reaction. The increase in rate with change of surface structure depends on the following factors in increasing order of importance: the presence of band gap surface states, the (established) jump in the order of magnitude of conductance of SiOx at x = 1.8, and the (argued) increasing availability of Si bonds during increasing reduction of the surface, thus causing an increase in the rate constant of a rate-determining proton transfer. © 1984.
J.C. Marinace
JES
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
T.N. Morgan
Semiconductor Science and Technology