Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Ellen J. Yoffa, David Adler
Physical Review B
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials