Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Stathis, R. Bolam, et al.
INFOS 2005
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals