Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system

Corneliu Constantinescu

SPIE Optical Engineering + Applications 2009

Peter J. Price

Surface Science

S. Cohen, J.C. Liu, et al.

MRS Spring Meeting 1999

F.J. Himpsel, T.A. Jung, et al.

Surface Review and Letters