Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008
The relative rates of varying Nb/Nb-TBE monomer feed ratios were evaluated by using real-time monitoring via in-situ FTIR spectroscopy of alternating copolymerizations of MA with Nb and Nb-TBE. Pseudo first order kinetic plots constructed from the in-situ FTIR absorbance data indicated that the rate of reaction is a strong function of the Nb/Nb-TBE ratio and decreased with increasing Nb-TBE.
Dario L. Goldfarb, Sean D. Burns, et al.
SPIE Advanced Lithography 2008
Thomas I. Wallow, Robert D. Allen, et al.
Microlithography 1998
Robert D. Allen, Phillip J. Brock, et al.
J. Photopolym. Sci. Tech.
Luisa D. Bozano, Phillip J. Brock, et al.
SPIE Advanced Lithography 2011