W.D. Hinsberg, Scott A. MacDonald, et al.
J. Photopolym. Sci. Tech.
No abstract available.
W.D. Hinsberg, Scott A. MacDonald, et al.
J. Photopolym. Sci. Tech.
Hiroshi Ito, William P. England, et al.
Microlithography 1993
J. Fahey, K. Shimizu, et al.
Journal of Polymer Science Part A: Polymer Chemistry
W.D. Hinsberg, Scott A. MacDonald, et al.
Microlithography 1993