R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
A series of polyimides was synthesized to facilitate the study of several structure/property relationships, including relative permittivity, moisture absorption, free volume, and viscoelastic transitions. This series was based on hexafluoroisopropylidene bis(phthalic anhydride) and various diamines, with the intention of having a number of fluorine/hydrogen and symmetric/asymmetric analog sets. Since several of the fluorinated diamines were exceptionally unreactive, a multistep polycondensation polymerization technique was developed to obtain materials of sufficient molecular weight for property evaluation. Effects of fluorine incorporation on the aforementioned properties are reported. © 1994, American Chemical Society. All rights reserved.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Lawrence Suchow, Norman R. Stemple
JES